Study effect of incidence angle on ion implantation in ZnO matrix

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Home / Volume 19 / Issue 3 / DOI: 10.15251/JOR.2023.193.345

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Study effect of incidence angle on ion implantation in ZnO matrix

J. Ovonic. Res. 2023 , 19(3), 345–349; https://doi.org/10.15251/JOR.2023.193.345